✦ LIBER ✦
Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating
✍ Scribed by T. Ikehara; R. Maeda
- Book ID
- 106184797
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 379 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
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