Fabrication of a uniform microlens array over a large area using self-aligned diffuser lithography (SADL)

Fabrication of a 60-nm-Diameter Perfectl

Fabrication of a 60-nm-Diameter Perfectly Round Metal-Dot Array over a Large Area on a Plastic Substrate Using Nanoimprint Lithography and Self-Perfection by Liquefaction

✍ Chao Wang; Qiangfei Xia; Wen-Di Li; Zengli Fu; Keith J. Morton; Stephen Y. Chou 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 658 KB

## Abstract Typically, nanopatterning on plastic substrates has poor fidelity, poor adhesion, and low yield. Here the proposal of and the first experiment using a new fabrication method that overcomes the above obstacles and has achieved arrays of 60‐nm‐diameter, perfectly round metal dots over a l