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Fabrication of a thermoplastic multilayer microfluidic chip

✍ Scribed by Jingmin Li; Chong Liu; Xue Ke; Zheng Xu; Meng Li; Yajie Duan; Yan Fan; Liding Wang


Book ID
119299650
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
856 KB
Volume
212
Category
Article
ISSN
0924-0136

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## Abstract We report the fabrication of a silicon nanowire (SiNW) transistor array realized in a top‐down process on 4β€²β€² silicon‐on‐insulator (SOI) wafers. This process is a second, optimized version combining thermal nanoimprint lithography and wet chemical etching to define planar nanowires and