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Fabrication of a submicron source-drain gap for p–i–p field effect transistors using epitaxial diamond layers

✍ Scribed by Kawakami, N.; Yokota, Y.; Tachibana, T.; Hayashi, K.; Inoue, K.; Kobashi, K.


Book ID
122437267
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
246 KB
Volume
13
Category
Article
ISSN
0925-9635

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