Fabrication of a conductive nanoscale electrode for functional devices using nanoimprint lithography with printable metallic nanoink
✍ Scribed by YoungJa Kim; GeeHong Kim; JaeJong Lee
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 406 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
This paper proposes two metal patterning processes. In each process, nanoimprint lithography (NIL) is used with commercialized particle-based silver nanoink which has appropriate properties for NIL. One process is a direct NIL process with a polydimethylsiloxane (PDMS) stamp; the other is a combined NIL and lift-off process. The direct NIL process is executed by using a xylene-absorbed PDMS stamp to decrease the curing time and minimize the residuals. A flexible PDMS stamp can also be wrapped around a quartz cylinder and used as a roll stamp to enlarge the patterned area. The direct NIL process successfully produced silver line patterns in the range of 200-300 nm, and the combined NIL and lift-off process successfully produced silver line patterns in the range of 15-60 nm.