✦ LIBER ✦
Fabrication of a beam-mass structure using single-step electrochemical etching for micro structures (SEEMS)
✍ Scribed by Ohji, H; Gennissen, P T J; French, P J; Tsutsumi, K
- Book ID
- 125448582
- Publisher
- Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 354 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0960-1317
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