✦ LIBER ✦
Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition
✍ Scribed by S.E. Huq; Z.W. Chen; R.A. McMahon; G.A.C. Jones; H. Ahmed
- Book ID
- 107920438
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 335 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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