Fabrication of 1.55-μm Si-based resonant cavity enhanced photodetectors using sol-gel bonding

✍ Scribed by R.W. Mao; C.B. Li; Y.H. Zuo; B.W. Cheng; X.G. Teng; L.P. Luo; J.Z. Yu; Q.M. Wang

• Book ID: 119801299
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 134 KB
• Volume: 16
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/lpt.2004.831049