Fabrication of 15 μm thick Si-hole masks for demagnifying projection systems for ion- or electron-beams

✍ Scribed by J. Olschimke; I.W. Rangelow; T. Tschudi; R. Kassing

• Book ID: 103597969
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 535 KB
• Volume: 6
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(87)90086-4