✦ LIBER ✦
Fabrication of 0.1-μm planar-doped pseudomorphic HEMT's using a PECVD silicon nitride assisted process
✍ Scribed by G. Zou; W. De Raedt; M. Van Hove; M. Van Rossum; Y. Jin; H. Launois
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 263 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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