✦ LIBER ✦
Fabrication concept for a CMOS-compatible electrostatically driven surface MEMS switch for RF applications
✍ Scribed by K.U. Harms; J.T. Horstmann
- Book ID
- 113797660
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 877 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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