Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane

✍ Scribed by Sehr, Harald; Evans, Alan G R; Brunnschweiler, Arthur; Ensell, Graham J; Niblock, Trevor E G

• Book ID: 127052852
• Publisher: Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 176 KB
• Volume: 11
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/11/4/303