𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane

✍ Scribed by Sehr, Harald; Evans, Alan G R; Brunnschweiler, Arthur; Ensell, Graham J; Niblock, Trevor E G


Book ID
127052852
Publisher
Institute of Physics
Year
2001
Tongue
English
Weight
176 KB
Volume
11
Category
Article
ISSN
0960-1317

No coin nor oath required. For personal study only.