Fabrication and test of sol–gel based planar oxygen optodes for use in aquatic sediments

Effects of Ar and O2 additives on photop

Effects of Ar and O2 additives on photopatternable sol–gel etching in an SF6-based plasma for planar lightwave circuit fabrication

✍ B. Kolodziejczyk; A.R. Ellingboe; S. Daniels; L. Oksuz; M. Oubaha; H. Barry; R. 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 571 KB

We present a novel study of the interaction of SF 6 -based plasmas with sol-gel materials in a parallel plate reactive ion etching (RIE) system. The purpose of these experiments was to obtain quantitative measures and optimisation of the RIE parameters, which can be used in the microfabrication of p