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Fabrication and test of reaction bond silicon carbide for optical applications

โœ Scribed by Wang YAO; Yu-min ZHANG; Jie-cai HAN; Hong-bo ZUO


Book ID
117692993
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
738 KB
Volume
16
Category
Article
ISSN
1003-6326

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## Abstract The high melting point and the limited diffusion of impurities in silicon carbide have greatly restricted the use of conventional ion implantation and furnace to incorporate and activate dopants. A laser doping technique overcomes these obstacles for doping silicon carbide and other wid