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Fabrication and quality factor control of a microelectromechanical system resonator with linear differential drive

✍ Scribed by Anthony, C.; Turnbull, R.; Wei, X.; Ward, M.; Collins, S.

Book ID: 114445183
Publisher: The Institution of Engineering and Technology
Year: 2010
Tongue: English
Weight: 493 KB
Volume: 4
Category: Article
ISSN: 1751-8822
DOI: 10.1049/iet-smt.2009.0081

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