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Fabrication and properties of one-mask-patterned ferroelectric integrated capacitors

✍ Scribed by Kazuyoshi Torii; Kenichi Shoji; Hiroshi Kawakami; Takao Kumihashi; Toshihiko Itoga; Natsuki Yokoyama; Masahiro Moniwa; Tooru Kaga; Yoshihisa Fujisaki

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 981 KB
Volume: 121
Category: Article
ISSN: 0424-7760
DOI: 10.1002/(sici)1520-6416(199710)121:1<43::aid-eej6>3.0.co;2-#

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