Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers

✍ Scribed by V. Nazmov; E. Reznikova; J. Mohr; A. Snigirev; I. Snigireva; S. Achenbach; V. Saile

• Book ID: 106184734
• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 409 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-004-0433-0