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Fabrication and photoluminescence properties of erbium doped size-controlled silicon nanocrystals

โœ Scribed by J Heitmann; M Schmidt; M Zacharias; V.Yu Timoshenko; M.G Lisachenko; P.K Kashkarov

Book ID
108214984
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
243 KB
Volume
105
Category
Article
ISSN
0921-5107

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## Abstract Erbiumโ€doped lowโ€dimensional Si films with different microstructures were deposited by reactive magnetron sputtering on glass substrates by varying the hydrogen flow rate during deposition. Amorphous, microโ€ and nanocrystalline samples, consisting of Si nanocrystalls embedded in silicon