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Fabrication and performance characteristics of high-frequency micromachined bulk acoustic wave quartz resonator arrays

✍ Scribed by Kao, Ping; Allara, David; Tadigadapa, Srinivas

Book ID: 126245941
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 814 KB
Volume: 20
Category: Article
ISSN: 0957-0233
DOI: 10.1088/0957-0233/20/12/124007

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