Fabrication and Measurement of Low-Stress Polyimide Membrane for High-Resolution Variable Optical Attenuator

✍ Scribed by Su, G.-D.J.; Yu-Wei Yeh; Chiu, C.-W.E.; Chao-Hu Li; Tyng-Yow Chen

• Book ID: 114570290
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 249 KB
• Volume: 13
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/jstqe.2007.893270