✦ LIBER ✦
Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
✍ Scribed by Gueye, R.; Akiyama, T.; Briand, D.; de Rooij, N.F.
- Book ID
- 120087873
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 745 KB
- Volume
- 191
- Category
- Article
- ISSN
- 0924-4247
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