✦ LIBER ✦
Fabrication and experimentation of vertical spring-type micromirror using shielding screen structure
✍ Scribed by Tae-Sun Lim; Yong-Kweon Kim
- Book ID
- 117866248
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 218 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1077-260X
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