✦ LIBER ✦
Fabrication and electrical characteristics of ultrathin (HfO2)x(SiO2)1−x films by surface sol–gel method and reaction-anneal treatment
✍ Scribed by You-Pin Gong; Ai-Dong Li; Chao Zhao; Yi-Dong Xia; Di Wu
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 347 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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