Fabrication and Dielectric Characterization of Advanced BaTiO3/Polyimide Nanocomposite Films with High Thermal Stability

Preparation of Oriented Aluminum Nitride

Preparation of Oriented Aluminum Nitride Thin Films on Polyimide Films and Piezoelectric Response with High Thermal Stability and Flexibility

✍ M. Akiyama; Y. Morofuji; T. Kamohara; K. Nishikubo; Y. Ooishi; M. Tsubai; O. Fuk 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 469 KB 👁 1 views

## Abstract __c__‐Axis oriented aluminum nitride (AlN) thin films are successfully prepared on amorphous polyimide films by radiofrequency magnetron reactive sputtering at room temperature. Structural analysis shows that the AlN films have a wurtzite structure and consist of __c__‐axis oriented col