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Fabrication and characterization of three-dimensional silicon tapers

โœ Scribed by Sure, Anita; Dillon, Thomas; Murakowski, Janusz; Lin, Chunchen; Pustai, David; Prather, Dennis


Book ID
115404000
Publisher
Optical Society of America
Year
2003
Tongue
English
Weight
333 KB
Volume
11
Category
Article
ISSN
1094-4087

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Figure 5. Photographs of silver-coated, crosslinked polymer films. a) Silvered epoxide SU-8 2035 (15 mm ร— 30 mm substrate). b) Silvered semisolid acrylate described in this work (25 mm ร— 25 mm substrate).