✦ LIBER ✦
Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing
✍ Scribed by Tom Larsen; Stephan Keller; Silvan Schmid; Søren Dohn; Anja Boisen
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 283 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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