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Fabrication and characterization of MEMS-based flow sensors based on hot films

✍ Scribed by Rong-Hua Ma; Yu-Hsiang Wang; Sheng-Ling Chiang; Chia-Yen Lee

Publisher: Springer-Verlag
Year: 2010
Tongue: English
Weight: 391 KB
Volume: 17
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-010-1156-z

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