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Fabrication and characterization of humidity sensor based on (Li2MoO4)x(CaMoO4)1−x system

✍ Scribed by Il Jin Kim; Sang Do Han; Hi Deok Lee; Jin Suk Wang; Ishwar Singh; S.V. Kornilov

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
144 KB
Volume
116
Category
Article
ISSN
0921-5107

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✦ Synopsis

The characteristics of a humidity sensor using a water-soluble and a single crystal material with composition (Li 2 MoO 4 ) x (CaMoO 4 ) 1-x , where x is 0.8-0.9 have been studied in detail. The fabrication technology has been developed for a low humidity sensor. The specific procedures with the use of polystyrol and teflon combination as protective layer have been developed for technological sensors by microelectronics techniques. The logarithm of the sensor conductance log σ is linear decreasing function of ratio log 2 (C s /C), where C s is the concentration of saturated water vapours and C is the concentration of water vapours to be detected up to 8000 ppm.

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