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Fabrication and characterization of highly doped suspended silicon wires

✍ Scribed by A. Diligenti; M. Macucci; B. Pellegrini; M. Piotto

Book ID: 114155569
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 471 KB
Volume: 67-68
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00129-1

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