Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

✍ Scribed by Tiggelaar, R. M.; Berenschot, J. W.; de Boer, J. H.; Sanders, R. G. P.; Gardeniers, J. G. E.; Oosterbroek, R. E.; van den Berg, A.; Elwenspoek, M. C.

• Book ID: 121388179
• Publisher: Royal Society of Chemistry
• Year: 2005
• Tongue: English
• Weight: 791 KB
• Volume: 5
• Category: Article
• ISSN: 1473-0197
• DOI: 10.1039/B414857F