Fabrication and characterization of high-quality uniform and apodized Si/sub 3/N/sub 4/ waveguide gratings using laser interference lithography

✍ Scribed by Hopman, W.C.L.; Dekker, R.; Yudistira, D.; Engbers, W.F.A.; Hoekstra, H.J.W.M.; de Ridder, R.M.

• Book ID: 119803082
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 729 KB
• Volume: 18
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/lpt.2006.881226