✦ LIBER ✦
Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer
✍ Scribed by Jun-Phil Jung; Jin-Bock Lee; Jung-Sun Kim; Jin-Seok Park
- Book ID
- 113936417
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 217 KB
- Volume
- 447-448
- Category
- Article
- ISSN
- 0040-6090
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