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Fabrication and characterisation of high resistivity SOI substrates for monolithic high energy physics detectors

✍ Scribed by F.H. Ruddell; S.L. Suder; M.F. Bain; J.H. Montgomery; B.M. Armstrong; H.S. Gamble; D. Denvir; G. Casse; T. Bowcock; P.P. Allport; J. Marczewski; K. Kucharski; D. Tomaszewski; H. Niemiec; W. Kucewicz

Book ID: 108271694
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 289 KB
Volume: 52
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2008.06.057

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