Extremely smooth vertical facets of InP formed by reactive ion etching and selective chemical beam epitaxy regrowth

✍ Scribed by M. Gotoda; H. Sugimoto; S. Maruno; T. Isu; W. Susaki; M. Nunoshita

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 333 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91125-8