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Extremely low resistivity erbium ohmic contacts to n‐type silicon

✍ Scribed by Janega, P. L.; McCaffrey, J.; Landheer, D.

Book ID: 115467283
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 539 KB
Volume: 55
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.101611

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