✦ LIBER ✦
Extraction of the point-spread function in electron-beam lithography using a cross geometry
✍ Scribed by D. Schefzyk; D.E.F. Biesinger; D.A. Wharam
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 570 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
For high-quality dose corrections an accurate knowledge of the dose distribution of a single spot, the point-spread function (psf), is required. Usually this information is obtained by writing a set of parallel lines of variable separation and dosage. Subsequent analysis gives information about the value of the psf as a function of the chosen separation. Here we present an alternative method to extract the psf at arbitrary separation and to a high degree of accuracy. This is based upon the exposure of a cross shaped geometry, in which all relevant separations are present.