✦ LIBER ✦
Extensive thermal characterization of advanced resists by Modulated Temperature DSC (MT-DSC): Application to acrylate based 193 nm resists
✍ Scribed by P.J. Paniez; J-A. Guinot; B. Mortini; C. Rosilio
- Book ID
- 114155810
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 287 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0167-9317
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