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Extension of the Stoney formula for film–substrate systems with gradient stress for MEMS applications

✍ Scribed by Huang, Shusen; Zhang, Xin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Extensions of the Stoney formula for sub

✍ Freund, L. B.; Floro, J. A.; Chason, E. 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 279 KB

On the applicability of Stoney’s formula

✍ A. V. Dobrynin 📂 Article 📅 1997 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 51 KB