𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Explosive Liquid-Phase Crystallization of Thin Silicon Films during Pulse Heating

✍ Scribed by Andrä, G. ;Geiler, H.-D. ;Götz, G. ;Heinig, K. H. ;Woittennek, H.

Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
354 KB
Volume
74
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Crystallization of silicon thin films by
Crystallization of silicon thin films by current-induced joule heating using a tungsten overcoat
✍ Gwo-Mei Wu; Chen-Yen Wu 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 237 KB

## Abstract A modified crystallization process using current‐induced joule heating under vacuum is presented. A thin layer of high temperature resistant tungsten was sputtered on the amorphous silicon as the conducting and annealing medium. The thin film thickness was measured by α‐stepper. The hig