✦ LIBER ✦
Exploring the sheet resistance variation with various beam current densities in low-energy ion implantation
✍ Scribed by Yi-Sheng Lai; J.S. Chen; H.L. Sun; Z.B. Chen; C.T. Tien; S.Y. Yeh; C.W. Chen; F.S. Lee; Y.S. Ho; P.Y. Hsu; H.H. Wu; J.H. Wang; C.M. Yang
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 204 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0168-583X
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