Exploiting the third dimension in nanofabrication technology with scanned high energy ion beams

✍ Scribed by David Martín y Marero; Olga Enguita; Javier G. Zubiri; Antonio Rodríguez; Jaime Narros; Dirk O. Boerma

• Book ID: 103861276
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 150 KB
• Volume: 249
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.04.009