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Experiments and simulation of the diffusion and activation of the n-type dopants P, As, and Sb implanted into germanium

✍ Scribed by S. Koffel; R.J. Kaiser; A.J. Bauer; B. Amon; P. Pichler; J. Lorenz; L. Frey; P. Scheiblin; V. Mazzocchi; J.-P. Barnes; A. Claverie

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 466 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.09.023

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