✦ LIBER ✦
Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon
✍ Scribed by E Bär; J Lorenz; H Ryssel
- Book ID
- 108362210
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 233 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0026-2714
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