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Experimental verification of theory for the pumping mechanism of a dry-scroll vacuum pump

โœ Scribed by Tadashi Sawada; Shin Kamada; Wataru Sugiyama; Jun-ichi Takemoto; Shuji Haga; Masaru Tsuchiya

Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
199 KB
Volume
53
Category
Article
ISSN
0042-207X

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๐Ÿ“œ SIMILAR VOLUMES

A differential pumping system for one of
A differential pumping system for one of the ESRF ultra-high vacuum beamlines
โœ M Renier; A Draperi ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 288 KB

## When low photon energy ranges (3-40 keV1 are required in a synchrotron beamline, the use of beryllium windows to isolate the machine vacuum from the beamline is forbidden. In addition, if the operating pressure of the beamline is three orders of magnitude larger that of the machine, the only way