✦ LIBER ✦
Experimental verification of a novel electrical test structure for measuring contact size : G. Freeman, W. Lukaszek, T. W. Ekstedt and D. W. Peters. IEEE Trans. Semicond. Manufact. 2(1), 9 (February 1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 133 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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