✦ LIBER ✦
Experimental study of surface electronic properties of ECR-PECVD deposited a-C1−xNx:H films using UPS, XPS and spectroscopic ellipsometry
✍ Scribed by M Kildemo; M Lacerda; D Ballutaud; C Godet; S Raaen
- Book ID
- 117145580
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 268 KB
- Volume
- 299-302
- Category
- Article
- ISSN
- 0022-3093
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