✦ LIBER ✦

Experimental Study of Capacitive RFc-C4F8Discharge with Synchrotron Vacuum Ultraviolet Photoionization Mass Spectrometry

✍ Scribed by Zhongyue Zhou; Mingfeng Xie; Tang Tang; Yijun Zhang; Tao Yuan; Fei Qi; Tom Ni; Xueyu Qian

No coin nor oath required. For personal study only.

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