✦ LIBER ✦
Experimental study and computer simulation of aspect ratio dependent effects observed in silicon reactive ion etching
✍ Scribed by V.A. Yunkin; V.F. Lukichev; K.V. Rudenko; D. Fischer; E. Voges
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 967 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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