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Experimental results from a time-of-flight spectrometer for electron beam testing

โœ Scribed by A. Khursheed; A.R. Dinnis

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
262 KB
Volume
17
Category
Article
ISSN
0167-9317

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Experimental results from a second-order
Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes
โœ H.Q. Hoang; M. Osterberg; A. Khursheed ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 508 KB

This paper presents experimental results from a second-order focusing toroidal spectrometer attachment for the scanning electron microscope (SEM). The energy resolution of the spectrometer is measured to be 0.38% for an angular spread of 7 81, close to the numerical simulated value of 0.32% based up