✦ LIBER ✦
Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators
✍ Scribed by Tazzoli, A.; Rinaldi, M.; Piazza, G.
- Book ID
- 114572719
- Publisher
- IEEE
- Year
- 2012
- Tongue
- English
- Weight
- 408 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0741-3106
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